Tuesday, March 20, 2012

Ph.D. Oral Exam Announcement: Onur Can Akkaya


Stanford University Ph.D. Oral Examination – Department of Electrical Engineering 

Title: High-Sensitivity Thermally Stable Interferometric Acoustic Sensors and Optical Sensor Networks for Remote Sensing Applications 

Speaker: Onur Can Akkaya 
Dissertation Advisor: Prof. Olav Solgaard
Co-Advisor: Prof. Michel J. F. Digonnet 

Date: WednesdayMarch 21, 2012 
Time: 3:00 pm (refreshments at 2:45 pm) 
Location: Allen-X Auditorium (formerly CIS-X Auditorium) - Room 101 

Abstract: 

Optical sensors have been the key devices in a number of applications, including remote sensing, underwater acoustic communications, oil exploration, surveillance and structural health monitoring for massive aerospace and wind-energy structures. These applications impose critical specifications both on device level and systems level. 

In the first part of my talk, I will introduce a high-sensitivity, thermally stable, compact optical acoustic sensor with a large bandwidth and high dynamic range. The device is based on a photonic-crystal fabricated on a compliant single-crystal silicon membrane, which is placed near the metalized end of a single-mode fiber to form a Fabry-Perot (FP) cavity. We demonstrated high reproducibility in operating wavelength (±1 nm) and fabricated ten FP sensors with measured displacement sensitivities within ±0.3 dB. The response was shown to be polarization independent and thermally stable. We showed that ~130 °C change in temperature can be tolerated before the FP resonance shifts by only 1 nm. The FP interferometer enabled experimental detection of 4.5x10 -14 m/√Hz membrane displacement. An experimental sensor was shown to measure acoustic pressures down to a record low of 5.6 µPa/√Hz with a flat-band response greater than 8 kHz and a sensitivity extending down to at least 100 Hz. The dynamic range in pressure was greater than 100 dB. I will present an electromechanical model of the device as a tool for designing and optimizing this micro-physical structure. This analytical model enabled the analysis of the coupled parameters of the design on the device response and noise. Results are shown to be in very good agreement with the experimentally measured quantities. 

In the second part, I will present the design of a time-division-multiplexed optical sensor network architecture employing multiple low-gain erbium-doped fiber amplifiers. Using this architecture, I will demonstrate an experimental system with ten acoustic sensors multiplexed and interrogated with a single laser source at a single wavelength. The signal-to-noise-ratio for each sensor response was measured to be within ±0.95 dB of the nominal value. I will also present the system performance in terms of cross-talk and polarization dependence. Finally, I will introduce a model identifying the noise contributions in this complex system, which predicts that up to 350 sensors can be multiplexed with this new multiplexing architecture.  


Onur Can Akkaya
Ph.D. Candidate, Dept. of Electrical Engineering
Center for Nanoscale Science and Engineering
Stanford University, CA

Email: ocakkaya@stanford.edu
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Re: Problem stsetch SNF 2012-03-20 08:22:47: chamber won't vent

Rebooted the computer.

Problem stsetch SNF 2012-03-20 08:22:47: chamber won't vent

Can't use the stsetch because the chamber won't vent.

Monday, March 19, 2012

REMINDER for TODAY: RAITH IonLiNE Ion Beam Lithography system presentation by Lloyd Peto from RAITH GmbH Monday March 19th 2:00 - 3:00 PM Allen 101 conference room

Greetings Lab Members and SNF Faculty Advisers:

Your reminder that we have a special visitor coming to Stanford, Dr. Lloyd Peto from Raith GmbH,  presenting an update on the RAITH IonLiNE Ion Beam Lithography system.
He will also be reviewing several projects that are in progress, or have been recently completed, using the RAITH IonLiNE system in Dortmund.

I would be very pleased if faculty advisers could attend this meeting, to learn more about how we may be able to place this capable lithography and nano-engineering system here at SNF.

Dr. Peto and Dr. Mirwais Aktary will be here next Monday March 19th, 2012 and will be available to answer your questions on the system and possible applications for the system within the scope of your nanofabrication work.  All interested parties are invited to attend.

When: 2:00 to 3:00 PM Monday March 19th, 2012
Where:  Allen 101 conference room.

Abstract is below:




RAITH ionLiNE: An Integrated Ion Beam Lithography Platform for Nanofabrication

Lloyd Peto

Product Manager

Ion Beam Lithography Group

Raith  GmbH

 

 

Abstract

 

With the rapid growth in nanofabrication science and technology, the need for more flexible and direct nano-patterning systems is on the increase, where the typical requirement for such systems is automation; high resolution patterning over large areas; accurate overlay; patterning over long time period, and 3-D nano-structuring. For these demanding tasks, Raith has designed the ionLiNE, which is world's first dedicated ion beam lithography (IBL) instrument.  IBL patterning does not require resist processes and is enabling a growing range of unique applications that reduce process complexity for rapid prototyping.

This seminar will present an overview of the ionLiNE in terms of its capabilities as an enabling nanofabrication platform and as well discuss the latest results from advanced IBL tasks that have been achieved to date.  These results include batch nanopore fabrication at the wafer level for biomolecule sensing, 3D microfluidic mixing channels, large area diamond film patterning, x-ray zone plates, and large area gratings for photonics and plasmonics.

 

Date:      Monday March 19, 2012

 

Time:     2:00 – 3:00 PM

 

Venue:   Allen 101 Conference Room



Ph.D. Oral Examination - Shasha Wang

Stanford University Ph.D. Oral Examination – Department of Electrical Engineering

 

Title:
Hermetically Encapsulated Fully Differential Breathe-Mode Ring Resonator

 

Speaker: Shasha Wang
Advisor: Professor Thomas W. Kenny

 

Date: Thursday, March 22, 2012
Time: 2:00 pm (refreshments at 1:45 pm)
Location: Allen-X Auditorium (formerly CIS-X Auditorium) - Room 101

 

Abstract
As the modern electronic devices continue to miniaturize and integrate more functionalities, silicon based MEMS timing references attract more attentions and are replacing quartz crystal in the $5 billion market. They offer a lot of advantages such as small foot-print, low cost, low power consumption, etc.  However, the performance of MEMS based timing reference still need improving to overperform the well-establised quartz crystal. The oscillators' phase noise performance is particularly important, since the frequency references in RF devices must satisfy stringent phase noise specifications. In this talk, I will talk about how to design a MEMS oscillator to achieve good phase noise performance. 

First, I will talk about how to design MEMS resonators with high quality factor through minimizing air damping, anchor loss and thermoelastic dissipation. We have designed and fabricated a fully-differential breathe-mode ring resonators with a quality factor as high as 473,000 at 10MHz. This quality factor is approaching the theoretical maximum quality factor, set by the phonon to phonon scattering in the material. However, the motional impedance of our resonator is very high due to large transduction gap size limited by the fabrication process. We designed and analyzed an OP-AMP based three-stage trans-impedance amplifier to provide sufficient gain for close loop oscillation. Close-to-carrier (1kHz offset) phase noise performance of -120dBc/Hz is achieved.  The relatively poor noise performance is due to high motional impedance of our resonator. 

In the second part, I will talk about how to modify our fabrication process flow to reduce the resonator's motional impedance. We used surface mico-machining combined with bulk micro-machining to achieve a transduction gap size as small as 260nm, which reduces the motional impedance by 6x and also lowers DC bias voltage requirement. The resonator's quality factor and stability is well maintained too.

In the last part, I will briefly talk about using InvenSense Nasiri Fabrication platform to achieve integrated MEMS-CMOS structures. Open loop transmission response of the ring resonator with integrated CMOS Trans-impedance amplifier will be presented. Additionally, mechanical coupling method is used to form ultra-narrow bandwidth (<0.05% BW) breathe-mode ring filters. 


-------------------
Shasha Wang
PhD Candidate
Electrical Engineering Department
Stanford Micro Structures and Sensors Lab
Stanford University, California, USA




Friday, March 16, 2012

lab is open

Hi all,

The lab has been in use since 10 am, just thought to let you know.

mahnaz

Nitrogen, CDA and vacuum 3/16

Good morning

More facility shut down today for an nSil tie in,
Nitrogen will be worked on from now till 9 am tentatively.

CDA and house vacuum will be worked on today from 9 am till 10 am,
again, tentatively.
This will affect furnaces, epi, and LPCVD.

We will sent out an email and update you as we progress.

mahnaz