clean Si pocket wafer for tylan nitride?

Dear Labmembers,

I would like to deposit nitride on small pieces of Si and SOI wafers
using tylan nitride.
I am wondering if one of you have a clean Si pocket wafer.
It would be great if you could let me use your pocket wafer.
Please let me know and thank you very much.

best,
Kyeongran Yoo