Problem stsetch SNF 2008-01-12 18:23:18: plasma cut out, and He flow low?

In addition to the problem quickwin reports (plasma cut out)
I also notice that the He flow is substantially lower than usual (1 sccm versus normal of 2.5-3).
The plasma cut out seems to occur when it switches to etch cycle, then plasma is out for varying times, then restrikes.
Obviously when the plasma cuts out on a switched process, it wrecks the wafer!