Re: Problem stsetch SNF 2008-01-26 12:21:48: No plasma

Processed 2 wafer w/carrier using the DEEP recipe with no problems. Also had no problems running 2 wafer w/carrier using JAS recipe. I believe that the "No plasma" , "Coil out of tolerance" faults is caused by either a "leaky" wafer or a wafer that is not properly loaded onto the platen. In order to help me troubleshoot this problem, please either save the "bad" wafer for me or run your process when I am here.