At approximately 10:10am on Monday, Jan. 21st, we had a toxic gas
alarm in the gas bunker. As a result, all of the gases stored in
this room were shut off. This included gases such as silane,
germane, arsine, phosphine,... The gases were off until
approximately 11:45 am, at which time all were returned to service,
EXCEPT for phosphine running to Tylan bank 3.
If you were processing during this time, you may have seen a gas flow
alarm. You need to verify what impact this gas shutdown may have had
on your samples.
As of 11:45am, all gases EXCEPT phosphine servicing Tylan bank 3 have
been returned.
Regards,
John and Ed
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