YES Oven Update

Hello Labmembers....

In an attempt to try and eliminate the intermittant odors from
the YES Oven, we added 2 vacuum and nitrogen cycles to the program to
ensure that any residual HMDS is evacuated from the chamber. The 2
additional vacuum / nitrogen cycles add about 6 minutes to the total
process time. These changes in the program are not reflected on the
green program sheet at the tool but the steps are as follows:

Steps 1 through 9 are the same

Step 10: L= 0004 Loop statememt- Loop 4 times

Step 11: M= 2:00 02 2 minutes of vacuum to pump out residuals

Step 12: M= 1:09 01 1 minute 9 seconds of Nitrogen to
purge chamber

Step 13: L> 11 Loop statement- Loop back to step 11

Step 14 Continue with normal program.

Please continue to report any unusual odors in coral.

Thanks... Gary