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STSetch Email Log
Tuesday, March 4, 2008
Re: Problem stsetch SNF 2008-02-21 21:33:44: C4F8 flow out of tolerance
Installed new low and high flow C4F8 MFCs. Ran both MFCs at full flow (85 sccm and 170 sccm) for 1 hour. Flows deviated less than 5%. Need to run process qual.
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