I recommend that you keep the LL under vacuum by
loading a phantom wafer (IE: pretending to load one)
after you are done. This will at least start with the LL
under full vacuum. Once you disable, it will leak up slowly.
The leak is causing the turbo to go to high load and heat,
which is not good for it. Since replacement is serveral tens of
$k, it's worthwhile to not abuse it.
Next user can begin by unloading the phantom wafer and
then venting.
Tuesday, August 12, 2008
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