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STSetch Email Log
Tuesday, August 19, 2008
Comment stsetch SNF 2008-08-19 15:27:21: Update
Possible liquid in the C4F8 line. Pumped down the line to the gas cylinder for 1 hour. Ran the Deep recipe for 30 minutes without any problem. Need to monitor C4F8 flow. If still unstable, we will pump the gas line more thoroughly.
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