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STSetch Email Log
Tuesday, November 18, 2008
Comment stsetch SNF 2008-11-18 16:57:31: Quals after Turbo Replacement
Used DEEP recipe for 00:10:00
Etch rate Si = 1.88um/min
Etch rate PR = 248A/min
Selectivity Si : PR = 75.8 : 1
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