Installed new turbo pump. Ran the Deep recipe for 35 min, ran O2 plasma for 20 min with no problems.
Turbo pump baseline- With 100 sccm SF6 flow and throttle valve full open: press= 7.5 mT , turbo current = 5.55 A.
The plan is to check the baseline on a daily basis so that we can monitor the health of the turbo.
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