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STSetch Email Log
Monday, March 23, 2009
Re: Shutdown stsetch SNF 2009-03-23 07:51:21: Replacing C4F8 MFC
Installed new C4F8 mfc. Also installed a metering valve in the He cooling line. Ran O2 plasma and DEEP recipe for 1 hour with no problems.
Please qualify your process before committing your actual device.
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