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STSetch Email Log
Wednesday, May 20, 2009
Comment stsetch SNF 2009-05-20 18:50:45: SF6 flow check
Check MFC flows using a calibrated flow meter.
SF6 MFC:
set point = 130 sccm, actual = 213 sccm
set point = 45 sccm, actual = 130 sccm
C4F8 MFC:
set point = 85 sccm, actual = 86 sccm
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