Problem stsetch SNF 2009-05-08 22:59:37: Wafer frag inside chamber

When I unloaded my first wafer tonight, I found that a 10x20mm piece had broken off, presumably still inside the chamber. But I couldn't see it with a flashlight or even with the plasma on. He flow/pressure and power are normal. In view of this, I thought I won't red-light the machine and spoil it for others over the weekend, but rather let maintenance retrieve the fragment at their convenience. Sorry for causing the problem.