Problem stsetch SNF 2009-05-21 09:38:18: reducing SF6 flow did not work

Hi all,
Because of the talk about the SF6 MFC giving too much flow, I set my program so that SF6 flow was half the value before (from 130 sccm to 65 sccm). The result: completely charred wafer. So, think twice before you try the same approach to solve the current SF6 problem.