Comment stsetch SNF 2009-06-06 18:02:01: DEEP recipe coil reflected power high

i did several long (1hour) etches with DEEP today and for each the coil reflected power was really high (>100W) for the first 5-15 minutes then quickly reduced to a few W. i actually got great results (new mfc shows significant grass reduction and etch rate > 2.5um/min), but this could affect users running DEEP for shorter times. other users is the reflected power initially high on other recipes?