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STSetch Email Log
Monday, June 1, 2009
Re: Shutdown stsetch SNF 2009-05-31 15:39:39: Interlock tripped error
Recovered the user's wafer. Unable to duplicate the problem. I believe that it was cause by a high He leak rate. Please make a note of the He flow rate next time the problem reoccurs. The typical flow is about 2.4 sccm.
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