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STSetch Email Log
Wednesday, September 30, 2009
Re: Shutdown stsetch SNF 2009-09-27 08:47:51: please adjust wafer carrier position
Cleaned the chamber and loadlock. Replaced the wafer lift pneumatic coupler. Replaced one ceramic clamp.
Cycled wafers and ran an O2 plasma.
We'll adjust the wafer process position during the next PM.
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