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STSetch Email Log
Monday, November 30, 2009
Comment stsetch SNF 2009-11-30 23:56:10: Test results
Following 10 minutes of O2 clean & 5 minutes of chamber seasoning,
avg Si etch rate = 2.16 um/min
avg SPR3612 etch rate = 299 A/min
==> selectivity > 72:1
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