Comment stsetch SNF 2010-03-06 15:18:23: sample pieces broken and sitting side of chamber

wafer borken on the wafer carrier again and some large pieces fall to side of chamber. Continue etching process on other wafer and still functioning ok. However, we may need to clean out the pieces later.. (high breken rate on this batch of wafer with same design from last year.. will try to check how to reduce the wafer breakage issue