Problem stsetch SNF 2010-04-02 17:05:25: Etch rates after chuck rebuild

(this is posted as a problem to give users a heads up on the still lower etch rates)
Si ER = 1.81um/min, PR ER = 211A, sel = 86 : 1 without using the holder.
Si ER = 2.09um, PR ER = 198A, sel = 105.6 : 1using the holder with the new wite colored o-ring.
These results are remarkably similar to the ERs before the rebuild. The selectivities, however, have gotten better.
Please see wiki for comparison.