Re: Problem stsetch SNF 2010-04-09 15:22:17: Backside He leak still not fixed

Replaced the lip seal. Adjusted the backside helium bleed valve. Flow should be at 2.4 sccm, found it at 3.8 sccm. Ran an O2 recipe for 15 minutes, backside he flow = 2.41 sccm. Ran the Deep recipe with the carrier for 30 min. , backside he flow started at 3.5 sccm and ended at 3.1 sccm.