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STSetch Email Log
Wednesday, April 14, 2010
Re: Problem stsetch SNF 2010-04-13 18:09:14: HBC flow too high
Ran test wafer for 30 min (DEEP recipe) using the carrier w/ black oring. Helium flow varied from 3.5 to 4.5 sccm. Ran wafer (no carrier) for 10 min Helium flow was steady at 2.5 sccm.
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