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STSetch Email Log
Monday, June 21, 2010
Problem stsetch SNF 2010-06-21 14:40:21: He flow fluctuates 3.5~6.5
When I started to etch, He flow kept fluctuating from 3.5~6.5. I checked the wafer backside, but it looked clean. I also tried the wafer holder, but still fluctuated....
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