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STSetch Email Log
Tuesday, June 15, 2010
Shutdown stsetch SNF 2010-06-15 11:14:54: He issues
Ran new blank wafer. He pressure was oscillating from 0.2 to 0.75. Should be about 9.0-10.0.
He flow was 3.0 to 6.0. Should be steady at 3.0.
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