Comment stsetch SNF 2010-07-09 12:21:27: Qual after He valve adjustment

DEEP 00:10:00
Si ER = 2.06um/min
PR ER = 252A/min
Sel Si : PR = 82 : 1
DEEP 01:00:00
Si ER = 1.73um/min
PR ER = 169A/min
Sel Si : PR = 102 : 1
Tested with temp dots, did not get as hig as 130C