Installed a newly calibrated MFC. Took chamber pressure readings before and after the MFC replacement at various flow setpoints. Here are the results:
Setpoint - Ch. press (old MFC) , Ch. press (new MFC)
25 - 2.07 , 2.17
50 - 3.30 , 3.42
75 - 4.38 , 4.44
100- 5.36 , 5.36
125- 6.27 , 6.20
150- 7.11 , 7.00
175-7.93 , 7.76
200-8.84 , 8.57
225-9.65 , 9.37
250-10.65 , 10.28
Flows > 140 sccm on the old MFC were unstable but very stable on the MFC..
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