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STSetch Email Log
Friday, August 20, 2010
Comment stsetch SNF 2010-08-20 15:58:34: Quals before and after lip seal replacement
Before;
Si er = 1.93um/min
PR = 140A/min
Si : PR = 138 : 1
After;
Si er = 1.98um/min
PR = 119A/min
Si : PR = 166 : 1
Based on DEEP recipe 00:10:00
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