Comment stsetch SNF 2010-08-20 16:17:00: Results for PR etch rate tests

Several wafers were run this week in an effort to track down the report of increased resist etch rates. Here are the er's, selectivities and etch times;
8/18 10 mins, Si = 1.93um, PR = 140A, 138 : 1
8/18 10 mins, Si = 1.98um, PR = 119A, 166 : 1
8/19 10 mins, Si = 1.68um, PR 192A, 88 : 1
8/19 60 mins, Si = 1.7um, PR = 144A, 118 : 1
8/19 10 mins, Si = 1.57um, PR = 145A, 108 : 1
8/20 60 mins, Si = 1.48um, PR = 151A, 98 : 1
We need to figure out why the Si er's are decreasing.