Comment stsetch SNF 2010-08-28 18:14:50: APC setpoint for DEEP recipe

I noticed that the APC setpoint in the DEEP recipe has been changed (by staff?) from 69% to 66% presumably to address the slightly higher process pressures that users were seeing. No note was made in Coral, so users that ran DEEP recently may want to check their etch results. Pressures are now ~16 mT in dep and ~27 mT in etch.