Monday, August 23, 2010
Problem stsetch SNF 2010-08-23 16:53:52: Check Etch Rates
See Nancy's comment from 8/20. Elmer replaced the lip seal and backside He flow is better controlled. However, Nancy's results still seem to show inconsistent etch rates. We will continue to monitor and troubleshoot. In the meantime, be aware of this concern and please report your results and observations. Thanks.
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