No problem found. Cycled a wafer in and out of the chamber 2x and timed the load and vent cycles.
Time from pressing the Load button to Ready for process = 1.92 min and 1.97 min . Chamber door opens after about 1 min of the Load cycle.
Time from pressing vent to lid open = 1.42 min and 1.25 min
Monday, August 2, 2010
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