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STSetch Email Log
Friday, September 17, 2010
Comment stsetch SNF 2010-09-17 20:31:52: Qual following SF6 MFC recal
Results:
Average Silicon ER = 2.09 microns/min
Silicon etch nonuniformity = 4.9%
Resist ER = 220 A/min
Selectivity of silicon to resist = 95
Results are normal
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