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STSetch Email Log
Thursday, October 7, 2010
Comment stsetch SNF 2010-10-07 17:20:41: He pressure warning
On my 3rd and 4th wafers (of 4) the He pressure dropped from 9.79T to 4.66. There was no noticable change in the PR etch rate, but my etches are short, 10 mins.
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