Comment stsetch SNF 2010-10-24 05:10:52: two wafer chunks in chamber

my wafer grenaded with 5 minutes of etch remaining. the features are small openings taking 5% area, so wafer is not supposed to be even remotely fragile. i see two chunks still inside, but those will likely etch away after a few more hours. helium flow still looks good, 2.65 with holder, so just a comment.