Comment stsetch SNF 2010-12-01 17:52:40: Quick qual after chamber clean

I ran three wafers with the following results;
1 Si ER =1.69um/min
2- Si ER = 1.77
3- Si ER = 1.82
All had a steady ER for PR of 200A/min
This may mean that with more use the ER for Si may increase.