Comment stsetch SNF 2011-01-26 15:20:56: Grass check for SMOOSHAL

I ran a wafer at 15.5 mins two times. After the first 15.5 min the etched areas had texture. After the next 15.5 mins the same areas were showing the hazy stage of grassing (under optical 'scope it looks like particles in open areas). Around the clamp marks the grassing was severe.
This was using our standard qual mask. Early runs using DEEP (and a different mask) looked very good at 15.5 mins.
As a work around measure while we figure out what has shifted with the SMOOSHAL recipe users might consider increasing the etch time by a second or two.