Sunday, January 9, 2011

Shutdown stsetch SNF 2011-01-09 21:39:16: Wafer Broken in the Chamber

Users,
I am sorry. My wafer broke in the middle of the etch.
My wafer was loaded on top of the substrate holder and
still managed to broke. It never happened to me before.
I have asked Eric to help me,if he is free.
I have also left a NOTE on the tool to NOT to use it.
I am very sorry,
Pradeep

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