Comment stsetch SNF 2011-03-04 16:07:57: Mar quals

O2CLEAN run for 30 min, DEEP run for 15 min for seasoning
Three wafersrun for 10 min, DEEP, with the following results;
1 Si ER = 1.82um/min, PR ER = 199A, Sel Si : PR = 91 : 1
2 Si ER = 1.88um/min, PR ER = 199A, Sel Si : PR = 94 : 1
3 Si ER = 1.82um/min, PR ER = 210A, Sel Si : PR = 87 : 1