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STSetch Email Log
Thursday, May 12, 2011
Comment stsetch SNF 2011-05-12 15:38:35: 2nd Qual after repairs
DEEP 00:10:00
Si ER = 1.60um/min, PR ER = 204A, Sel Si : PR = 78 : 1
Note: the Si etch rate is still lower than expected ~2.um/min)
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