Sunday, May 15, 2011

Comment stsetch SNF 2011-05-15 14:00:11: pieces in chamber

a couple of pieces broke off of my wafer during unloading. the pieces are large (>1cm) and all fell clear of the loader (i was using the wafer holder). the He leak rate is unchanged (3.8 w/ holder) and the pieces don't seem to be affecting anything.

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