Tuesday, May 24, 2011
Problem stsetch SNF 2011-05-24 15:27:55: System will not process
Wafer loaded, but when process is selected will not go past 'standby' step'. I did notice that while this is occurring the loadlock pressure shows very low, lik 7.5mT. It is usually about 84mT. It rises slowly. Perhaps a leak between the LL and chamber?
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