Shutdown stsetch SNF 2011-05-01 00:02:16: wafer broke in chamber

I have a feeling there is something wrong with the machine. About 2 weeks ago, I did the same process and 7 wafers etched well and since then every wafer has broke ( a total of 4 wafers) . Debbie and I did test etches with the holder and all the resist burnt off, so there is something severly wrong with this machine.