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STSetch Email Log
Tuesday, October 4, 2011
Problem stsetch SNF 2011-10-04 12:34:07: Etch rates decresed during qual
DEEP 00:10:00
Sept --Si ER =2.02um/min, PR ER = 224A/min, Sel = 90:1
Oct-- Si ER = 1.81, PR ER = 194, Sel = 93 : 1
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