Comment stsetch SNF 2012-06-29 16:07:10: C4F8 flow still bad, not recommended for DEEP

Per Mary Tang's instructions I closed the C4F8 valve, pumped out the line and reopened the valve slowly in the hope of clearing any clogs in the C4F8 MFC. It didn't seem to help; flow is still unstable and machine errors out (tolerance error) within 15 min of starting DEEP. We are not yet red-lighting the machine because it could conceivably still be used for non-critical etches (e.g. SF6-only recipes) over the weekend, but it will likely be red-lighted by the end of the weekend to reflect its true status.