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STSetch Email Log
Friday, July 27, 2012
Comment stsetch SNF 2012-07-27 15:23:38: Qual 21 July
DEEP 00:10:00
Si ER = 2.27um/min, PR ER = 241A/min, Sel = 94:1
Note; the He flow was adjusted after this qual was run. It went from 4.03 to 3.78.
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