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STSetch Email Log
Tuesday, March 4, 2008
Re: Problem stsetch SNF 2008-02-27 08:27:06: C4F8 doesn't reach set point and my dummy wafer is stuck inside
C4F8 mfc's replaced and run for an hour. Flows stabilzed. Deep recipe run to season chamber for 10 m ins. Qual run. Looks good. Results in comments.
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