Problem stsetch SNF 2009-11-10 12:33:26: software crash for machine communication

the software for stsetch crashed related to a machine communication problem (communication between process chamber/load lock and controllers). could be a hardware problem or could be a software issued solved by reboot. i could not re-initialize software with any tricks i know and didn't want to venture into the unknown. my wafer is trapped inside the etch chamber (healthy and intact in the holder). please put it in the single wafer carrier i left on top of stsetch by the loadlock.