Re: Problem stsetch SNF 2010-04-14 04:18:24: flow rate is around 5.2

Ran test wafer for 30 min (DEEP recipe) using the carrier w/ black oring. Helium flow varied from 3.5 to 4.5 sccm. Ran wafer (no carrier) for 10 min Helium flow was steady at 2.5 scc